Atmospheric Pressure Inductive Soft Etch for Photoresist Strip
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Table of Contents
Atmospheric Pressure Inductive Soft Etch for Photoresist Strip
Introduction
Low- and High-Pressure Plasma
Atmospheric Pressure Plasma Options...
Inductive Thermal Plasmas
Inductive Thermal Plasmas
Atmospheric pressure oxygen plasma composition
Simplified Model of Near-Wafer Region
Results: Photoresist etch rate
Results: Photoresist etch rate
Measurement of Wafer Temperature
Results: Wafer Temperature
Plasma Damage Issues: UV Radiation Background Info
Plasma Damage Issues: Wafer Charging Background Information
Plasma Damage Results: Direct Voltage Measurement
Plasma Damage: CHARM II Results
Strip of Low-K Materials
Strip of Low-K Materials
Conclusions
Acknowledgements
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