Low- and High-Pressure Plasma
Low-pressure plasma
- Electron T - 2-4eV
- Ion T 0.03 - 0.05 eV
- Sheath voltage - 10-20 V
- Ion bombardment energy - 12-15eV
High-pressure plasma
- Electron T - 0.3-0.5eV
- Ions recombine in cold thermal boundary layer rather than at walls
- Species are in (approximate) LOCAL THERMAL EQUILIBRIUM: Te = Ti