TimeDomain CVD, Inc.

Fundamentals of Chemical Vapor Deposition

CVD Films

 

"Conventional" Dielectrics: Silicon Dioxide, BPSG	Film properties and applications SiH4 / O2 thermal CVD TEOS / O2 thermal CVD TEOS / O3 thermal CVD SiH4 / N2O PECVD TEOS / O2 PECVD HDP CVD
Silicon nitride	Film properties and applications Si3N4 thermal CVD SiN:H plasma CVD
Low K and High K Dielectrics	F and CH3 in silica Ta2O5 BST
Metals	W and WSi(x) TiN Cu Al
Silicon and GaAs	epitaxial silicon polycrystalline silicon amorphous hydrogenated silicon GaAs MOCVD