TimeDomain CVD, Inc.

Fundamentals of Chemical Vapor Deposition

CVD Reactor Designs

 

Introduction	CVD Reactor Configurations
Tube Reactors	Tube Reactor Overview Transport in Tube Reactors Tube Reactor Conclusions
Showerhead Reactor	Showerhead Overview Flow and Mass Transport Wafer Heat Transport Showerhead Conclusions
High Density Plasma Reactor	HDP Deposition Overview HDP Reactor Design Issues Transport in HDP Reactors Wafer Chucks for HDP HDP Conclusions
Atmospheric Pressure Reactor	APCVD Reactor Overview Transport in APCVD Reactors APCVD Reactor Conclusions