Thermal Plasmas:

Thermal Plasmas [volume 1], M. Boulos, P. Fauchais and E. Pfender, Plenum 1994, ISBN 0-306-44607

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P.Buchner et al, Plasma Sources Sci. Tech., 6, (1997), 450

V.M. Goldfarb et al, Teplofiz, Vysoc. Temp. (Russian), 5(4), (1967)

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V.S.Klubnikin (Strawberry) et al, Teplofiz, Vysoc. Temp. (Russian), 13, (1975), 473

A.V.Donskoi, V.M.Goldfarb, V.S.Klubnikin, "Physics and Technology of low-temperature plasma " (Russian), 1972
 
 

Etching / Photoresist Strip:

P.Singer, Semiconductor International, Aug., 1996, 83

K.Inomata et al, Appl. Phys. Lett., 66(17), (1995), 2188

M.C.M van de Sanden et al, 44th AVS Symp. , abstracts (1997), 73

G.Pavlov et al, Appl.Phys A, 63, (1996), 9

O.Siniaguine, 1st Plasma Process-Induced Damage symposium, (1996), 151
 
 

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